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in EBSD explained:

Basics of EBSD

EBSD Experiments

Undertaking Experiments

Sample Preparation

Links to this section:

System Components
Pattern Formation
Interpreting the diffraction pattern
Calibration
Indexing
Band Intensity
Summary

Basics of EBSD

Principal system components

The principal components of an EBSD system are (Figure 1):

• A sample tilted at 70° from the horizontal.

• A phosphor screen which is fluoresced by electrons from the sample to form the diffraction pattern.

• A sensitive charge coupled device (CCD) video camera for viewing the diffraction pattern on the phosphor screen.

• A vacuum interface for mounting the phosphor and camera in an SEM port. The camera monitors the phosphor through a lead glass screen in the interface and the phosphor can be retracted to the edge of the SEM chamber when not in use.

• Electronic hardware that controls the SEM, including the beam position, stage, focus, and magnification.

• A computer to control EBSD experiments, analyse the diffraction pattern and process and display the results.

• An optional electron detector mounted below the phosphor screen for electrons scattered in the forward direction from the sample.

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