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EBSD and EDS are integrated in the Oxford Instruments AZtec Synergy system providing sophisticated solutions to materials characterisation. This is includes innovative methods to correctly characterise materials with similar crystal structures. 

The EDS spectra and EBSPs can be acquired simultaneously for phase identification. In addition, simultaneous map data can be acquired to determine phase distribution and phase fraction.

To see a demonstration of simultaneous EBSD & EDS acquisition in AZtec Synergy, click here.

The following are application notes for AZtec Synergy.

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