Typically an EBSD system (Figure 1) consists of:
- A crystalline sample tilted to 70º from horizontal, by use of the SEM stage or a pretilted holder.
- A phosphor screen, which is fluoresced by the electrons scattered from the sample.
- A sensitive camera together with optics for viewing the pattern formed on the phosphor screen.
- An insertion mechanism, which accurately controls the position of the detector when it is in use, and retracts the detector to a safe position when it’s not in use to prevent interference with SEM operation.
- Electronics to control the SEM, including the beam and stage movements.
- A computer and software to control the EBSD experiments, collect and analyse the diffraction patterns, and display the results.
- forescatter diodes (FSD) mounted around the phosphor screen, used to generate microstructure images of the sample before collecting EBSD data.
- The EBSD system can optionally be integrated with an EDS system